TY - JOUR
T1 - MEMS gyroscopes in different operation modes
T2 - A review
AU - Chen, Zhennan
AU - Yan, Kaichen
AU - Wang, Xiaoxu
AU - Li, Rui
AU - Zhang, Ao
AU - Wang, Xiquan
AU - Wang, Yupeng
AU - Gao, Pu
AU - Li, Hua
AU - Wang, Chao
AU - Zhang, Junling
AU - Liu, Mingyong
AU - Lu, Qianbo
N1 - Publisher Copyright:
© 2025 Elsevier Ltd
PY - 2025/5/31
Y1 - 2025/5/31
N2 - The MEMS Coriolis Vibratory Gyroscope (CVG), a type of micro-inertial sensor, has been extensively utilized across various domains such as camera stabilization, virtual reality, inertial mouse, aerospace, autopilot, and wearable devices due to its merits of high precision, compactness, and robust immunity. In recent years, MEMS gyroscopes with new operation modes have continued to appear, whereas their performances vary greatly with respect to the different measurement principles. This paper aims to provide an overview of various types of operation modes and describe the essential features of the gyroscopes underlying the operation modes. According to the readout technology, the operation modes of MEMS gyroscopes are classified into amplitude-modulated (AM), whole angle (WA), and frequency-modulated (FM) gyroscopes. Following a brief introduction to their working principles, this paper highlights some recent representative works and outlines the advantages and disadvantages of all kinds of MEMS gyroscopes, along with their potential applications and development trends. The detailed comparison and content sketch a path for the operation modes of MEMS gyroscopes and may help build a holistic understanding of trade-offs and further work in this area.
AB - The MEMS Coriolis Vibratory Gyroscope (CVG), a type of micro-inertial sensor, has been extensively utilized across various domains such as camera stabilization, virtual reality, inertial mouse, aerospace, autopilot, and wearable devices due to its merits of high precision, compactness, and robust immunity. In recent years, MEMS gyroscopes with new operation modes have continued to appear, whereas their performances vary greatly with respect to the different measurement principles. This paper aims to provide an overview of various types of operation modes and describe the essential features of the gyroscopes underlying the operation modes. According to the readout technology, the operation modes of MEMS gyroscopes are classified into amplitude-modulated (AM), whole angle (WA), and frequency-modulated (FM) gyroscopes. Following a brief introduction to their working principles, this paper highlights some recent representative works and outlines the advantages and disadvantages of all kinds of MEMS gyroscopes, along with their potential applications and development trends. The detailed comparison and content sketch a path for the operation modes of MEMS gyroscopes and may help build a holistic understanding of trade-offs and further work in this area.
KW - AM mode
KW - FM mode
KW - MEMS gyroscope
UR - http://www.scopus.com/inward/record.url?scp=85217902905&partnerID=8YFLogxK
U2 - 10.1016/j.measurement.2025.116996
DO - 10.1016/j.measurement.2025.116996
M3 - 文献综述
AN - SCOPUS:85217902905
SN - 0263-2241
VL - 249
JO - Measurement: Journal of the International Measurement Confederation
JF - Measurement: Journal of the International Measurement Confederation
M1 - 116996
ER -