MEMS CAD methodology from 3D model to 2D mask layout

Jinghui Xu, Weizheng Yuan, Jianbing Xie, Honglong Chang

科研成果: 期刊稿件文章同行评审

3 引用 (Scopus)

摘要

A transfer methodology from 3D model to 2D mask layout in MEMS CAD field was put forward after studied respectively the format of the standard 3D model file and the 2D mask layout file. The direct file-to-file's transfer procedure from 3D model to 2D mask layout was realized, and the corresponding interface has been developed in C++ programming language. Finally, the feasibility and the efficiency was validated by the structures of typical MEMS devices-micro accelerator and micro gyroscope, the result shows that the methodology is feasible and highly efficient, which provides a efficient approach for realizing MEMS top-down and discretional flow design, simplifying the process of drawing the mask layout.

源语言英语
页(从-至)80-84+98
期刊Zhongguo Jixie Gongcheng/China Mechanical Engineering
19
1
出版状态已出版 - 10 1月 2008

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