Macro-modeling of micro structure with nonlinear large angle rotation behavior

A macromodeling method was presented to describe the nonlinear large angle rotation behavior of microstructure. The rotational kinetics equations of microstructure conventionally established with Euler angles method are nonlinear which require large computational cost and may cause nonconvergence of system level simulation of microstructure. Therefore, Euler parameter method was presented to linearize the rotational kinetics equations of microstructure and the macromodel of microstructure was coded with hardware description language MAST. The validity of the method is illustrated with the example of system level simulation of a electrostatic torsion micromirror. The simulation results show Euler parameter method has near finite element method accuracy and the computation time is three times faster than that by Euler angles method.