Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator

Fang Chen, Weizheng Yuan, Honglong Chang, Ioannis Zeimpekis, Michael Kraft

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

24 引用 （Scopus）

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