Large-area uniform hydrogen-free diamond-like carbon films prepared by unbalanced magnetron sputtering for infrared anti-reflection coatings

Junqi Xu, Huiqing Fan, Weiguo Liu, Lingxia Hang

科研成果: 期刊稿件 › 文章 › 同行评审

30 引用 （Scopus）

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Material Science

Engineering

Physics