Industrially efficient method for measuring precisely 3D microstructure of MEMS

Weizheng Yuan, Xiaowei Wang, Binghe Ma

科研成果: 期刊稿件文章同行评审

1 引用 (Scopus)

指纹

探究 'Industrially efficient method for measuring precisely 3D microstructure of MEMS' 的科研主题。它们共同构成独一无二的指纹。

Engineering