TY - GEN
T1 - Fabrication of ZAO ceramic target and effect on the photoelectric properties of its film
AU - Han, Meikang
AU - Yang, Jueming
AU - Yin, Xiaowei
AU - Li, Jianping
PY - 2014
Y1 - 2014
N2 - ZAO ceramic target was fabricated by cold isotatic pressing and pressureless sintering ZAO powder used method of homogeneous precipitation. Then, ZAO film was deposited by RF magnetron sputtering of the lab-made ZAO target. The microstructures and phases of ZAO target and its film were characterized by scanning electron microscopy (SEM), energy dispersion spectroscopy (EDS), and X-ray diffraction apparatus. Results show that the relative density of the target is above 93%, and there are the second phase ZnAl2O4 in ZnO crystal boundary. ZAO films with resistivity 1.083 × 10-3 Ω•cm and visible light transmittance beyond 85% were obtained by the target.
AB - ZAO ceramic target was fabricated by cold isotatic pressing and pressureless sintering ZAO powder used method of homogeneous precipitation. Then, ZAO film was deposited by RF magnetron sputtering of the lab-made ZAO target. The microstructures and phases of ZAO target and its film were characterized by scanning electron microscopy (SEM), energy dispersion spectroscopy (EDS), and X-ray diffraction apparatus. Results show that the relative density of the target is above 93%, and there are the second phase ZnAl2O4 in ZnO crystal boundary. ZAO films with resistivity 1.083 × 10-3 Ω•cm and visible light transmittance beyond 85% were obtained by the target.
UR - http://www.scopus.com/inward/record.url?scp=84903993398&partnerID=8YFLogxK
U2 - 10.1002/9781118932995.ch16
DO - 10.1002/9781118932995.ch16
M3 - 会议稿件
AN - SCOPUS:84903993398
SN - 9781118932988
T3 - Ceramic Transactions
SP - 159
EP - 166
BT - High Temperature Ceramic Matrix Composites 8 - A Collection of Papers Presented at the HTCMC 2013 Conference
PB - American Ceramic Society
T2 - 8th High Temperature Ceramic Matrix Composites Conference, HTCMC 2013
Y2 - 22 September 2013 through 26 September 2013
ER -