Etching behavior of microdefect in diluted magnetic semiconductor Hg0.89Mn0.11Te

Zewen Wang, Long Zhang, Zhi Gu, Wanqi Jie

科研成果: 期刊稿件文章同行评审

摘要

The surface of Hg0.89Mn0.11Te wafer grown by vertical Bridgman method after being etched 30, 60, 90, 120, and 150 s by etchant of 150 mL saturation water solution of potassium bichromate and 20 mL HCl have been observed by optical microscope and scanning electron microscope. Grain boundaries and Te inclusions are distinctly observable after etched 30 s, but the intrinsical dislocation of wafer is only observable after 120 s. The density of dislocation etch pits shows a peak value at 60 s with increasing etching time, and turns to a steady state value after 120 s. The dimensions of etch pits is always increase with etching time increasing. The analysis shows that the initial dislocation etch pits are induced by the surface damaged layer.

源语言英语
页(从-至)561-564
页数4
期刊Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors
28
SUPPL.
出版状态已出版 - 9月 2007

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