Electromechanical characterization of a new micro programmable blazed grating by laser Doppler vibrometry

Engineering

• Blazed Grating 100%
• Step Response 50%
• Resonant Frequency 50%
• Damping Ratio ζ 50%
• Measured Result 50%
• Voltage Driving 50%
• Q Factor 50%
• Frequency Response 50%
• Optical Performance 50%
• Polysilicon 50%
• Displacement Relationship 50%
• Surface Micro-Machining 50%
• Pull-in Voltage 50%