Electrochemical deposition and optical properties of compact thin ZnO film

A compact thin ZnO film was fabricated on ITO conductive glass by electrochemical deposition method. The surface topography and thickness of thin ZnO film fabricated under different mass fraction of electrolyte, voltage and time was characterized by SEM. It is demonstrated that when the mass fraction of electrolyte, voltage and time is 1.2%, 1.0 V and 60 s, respectively, the ZnO film is compact and the thickness is just 120 nm, and the transmission in visible band is higher than 50%, providing the basis for the application of thin ZnO film in multilayer optical metamaterials.