Effects of the bias voltage on the microstructure, mechanical and tribological properties of ZrN/α-SiNx nanoscaled multilayer films

Ming Hu, Xiao Ming Gao, Li Ping Zhang, Yan Long Fu, Jun Yang, Li Jun Weng, Wei Min Liu

科研成果: 期刊稿件 › 文章 › 同行评审

指纹

探究 'Effects of the bias voltage on the microstructure, mechanical and tribological properties of ZrN/α-SiNx nanoscaled multilayer films' 的科研主题。它们共同构成独一无二的指纹。

Material Science