Effects of substrate bias and argon flux on the structure of titanium nitride films deposited by filtered cathodic arc plasma
Y. J. Zhang, P. X. Yan, Z. G. Wu, W. W. Zhang, G. A. Zhang, W. M. Liu, Q. J. Xue
科研成果: 期刊稿件 › 文章 › 同行评审
Y. J. Zhang, P. X. Yan, Z. G. Wu, W. W. Zhang, G. A. Zhang, W. M. Liu, Q. J. Xue
科研成果: 期刊稿件 › 文章 › 同行评审