Effects of residence time and reaction conditions on the deposition of SiC from methyltrichlorosilane and hydrogen

Cuiying Lu, Laifei Cheng, Chunnian Zhao, Litong Zhang, Fang Ye

科研成果: 期刊稿件 › 文章 › 同行评审

12 引用 （Scopus）

指纹

探究 'Effects of residence time and reaction conditions on the deposition of SiC from methyltrichlorosilane and hydrogen' 的科研主题。它们共同构成独一无二的指纹。

Engineering

Material Science

Chemical Engineering