Effect of corner angle on laser scribing width and depth of Al₂O₃ Ceramics: Experiment and numerical simulation

Laser scribing is a promising micromachining technique for the precision production of complex shapes like corner angle geometry on hard and brittle materials such as silicon, ceramics and glasses. The accuracy and quality of laser scribing depends on the operating parameters and geometries. In this paper, the effect of corner angle on the groove width and depth obtained on Al₂O₃ samples was studied experimentally, using Diode Pumped Solid State Laser Scriber, and simulated using ANSYS software. The experimental and calculated results all proved that the corner angle had important effect on the accuracy and quality of laser scribing due to the exist of heat accumulation effect and corner angle effect. A decrease of corner angle caused an increase of the groove width and depth on Al₂O₃. In addition, the laser scribing time also had important effect on the groove width and depth due to heat accumulation effect, and an increase of laser scribing time caused an increase of the groove width and depth on Al₂O₃.