Dielectric properties of aluminum-doped silcion carbide using chemical vapor deposition

Xiao Lei Su, Fa Luo, Zhi Min Li, Dong Mei Zhu, Wan Cheng Zhou

科研成果: 期刊稿件 › 文章 › 同行评审

指纹

探究 'Dielectric properties of aluminum-doped silcion carbide using chemical vapor deposition' 的科研主题。它们共同构成独一无二的指纹。

Engineering

Material Science

Chemical Engineering