Development of a dynamic driving circuit for MEMS programmable grating

The performance of MEMS programmable grating depends on the performance of the driving circuit to a very large extent. This paper has extracted the equivalent capacitance of the MEMS programmable grating based on its work characteristics and structure parameters, and developed an innovative dynamic driving circuit for MEMS programmable grating by using high-voltage amplifier. For avoiding self oscillation, two methods: frequency compensation and feedback capacitance respectively, have been adopted, which effectively improved the stability of the circuit. The dynamic performance of the circuit had been tested in oscillograph, which matched the PSPICE10 simulation results very well. This driving circuit has high voltage output rang(0-180 V), high frequency response(10 kHz) and a driving ability in wide capacitive load range(1-1 000 pF). It is appropriate for controlling MEMS programmable grating in complicate and dynamic conditions.