Design of electromechanical characteristics measuring system for MEMS scanner

A new microscanner was designed and fabricated using a Silicon-on-insulator (SOI) process. In order to realize real-time measurement of the electromechanical characterization for MEMS scanner, a measuring system was investigated including the principle of microscanner, the electromechanical characterization of microscanner, the measuring method, the system realization and the system accuracy evaluation. First, the principle of microscanner was presented and the design of structure was discussed as well as the electromechanical characterization. Then, based on the study of the measuring method, the design of measuring system was determined. Furthermore, the circuit and software in system were analyzed and designed. Finally, aiming to evaluate the accuracy and reliability of the measuring system, the tests on amplitude and frequency were implemented respectively and the experimental results agreed well with the data obtained by using Laser Doppler Vibrometer (LDV) and laser triangulation. It can satisfy the system requirements of stabilization, higher precision and real-time. Therefore, the research of this paper has significant reference value to the closed loop control of microscanner and the realization of micro spectrometer.