Design and simulation of micro spectrometer based on torsional MEMS grating

Bin Yan, Weizheng Yuan, Ruikang Sun, Dayong Qiao, Yiting Yu, Taiping Li

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

2 引用 （Scopus）

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Chemistry

Engineering