Design and modes of a novel two-dimensional microscanner with electrostatic actuation

A novel two-dimensional microscanner with electrostatic actuation is designed and fabricated based on silicon-on-insulator (SOI) technology, and the driving principle is analyzed for microscanner. Then the finite element analysis software of ANSYS is used to simulate the models of the first five orders, and the methods to calculate the resonant frequencies are analyzed for expected torsional modes theoretically. The resonant frequencies are measured by laser Doppler vibrometer. The results show that the microscanner could oscillate at the inherent frequencies of 402 Hz and 1218 Hz around the two rotational axes, which are consistent with the simulation results. The slight difference is caused by factors such as the model without comb structures, air damping and environmental temperature. This study is meaningful to design a microscanner actuated electrostatically with simpler structure.