BN coatings prepared by low pressure chemical vapor deposition using boron trichloride-ammonia-hydrogen-argon mixture gases

Yu Cheng, Xiaowei Yin, Yongsheng Liu, Siwei Li, Laifei Cheng, Litong Zhang

科研成果: 期刊稿件 › 文章 › 同行评审

55 引用 （Scopus）

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Chemistry

Engineering

Material Science

Chemical Engineering