Bimodal Surface Acoustic Wave Sensor Based on Vanadium-Doped Zinc Oxide Film for High-Precise Pressure Measurement Enabled with Temperature Compensation

Chuqiao Wang, Wei Gao, Guangyao Pei, Yunzhe Liu, Kai Cheng, Zheng Guo, Jian Luo, Binghe Ma

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Physics

Material Science

Chemical Engineering