Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device

Xianglian Lu; Weizheng Yuan; Weijian Li; Pengfei Huo; Chengyu Jiang

Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device

Xianglian Lu, Weizheng Yuan, Weijian Li, Pengfei Huo, Chengyu Jiang

机电学院

Northwestern Polytechnical University Xian

科研成果: 期刊稿件 › 文章 › 同行评审

1 引用（Scopus）

摘要

Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system (MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy.

源语言	英语
页（从-至）	411-415
页数	5
期刊	Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University
卷	23
期	3
出版状态	已出版 - 6月 2005

其它文件与链接

链接到 Scopus 的出版物

引用此

@article{6f7a18bff62e471fb23f6edcacc06627,

title = "Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device",

abstract = "Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system (MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy.",

keywords = "Arnoldi algorithm, Macromodeling method, MEMS device, Taylor series",

author = "Xianglian Lu and Weizheng Yuan and Weijian Li and Pengfei Huo and Chengyu Jiang",

year = "2005",

month = jun,

language = "英语",

volume = "23",

pages = "411--415",

journal = "Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University",

issn = "1000-2758",

publisher = "Northwestern Polytechnical University",

number = "3",

}

TY - JOUR

T1 - Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device

AU - Lu, Xianglian

AU - Yuan, Weizheng

AU - Li, Weijian

AU - Huo, Pengfei

AU - Jiang, Chengyu

PY - 2005/6

Y1 - 2005/6

N2 - Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system (MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy.

AB - Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system (MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy.

KW - Arnoldi algorithm

KW - Macromodeling method

KW - MEMS device

KW - Taylor series

UR - http://www.scopus.com/inward/record.url?scp=23444449615&partnerID=8YFLogxK

M3 - 文章

AN - SCOPUS:23444449615

SN - 1000-2758

VL - 23

SP - 411

EP - 415

JO - Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University

JF - Xibei Gongye Daxue Xuebao/Journal of Northwestern Polytechnical University

IS - 3

ER -

Arnoldi-algorithm-based macromodeling for coupled-domain MEMS device

摘要

其它文件与链接

指纹

引用此