Amorphous CNx films prepared by electrochemical deposition

Jianwei Sun, Yafei Zhang, Xiaoxia He, Weimin Liu, C. S. Lee, S. T. Lee

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10 引用 (Scopus)

摘要

Amorphous carbon nitride (CNx) films have been synthesized by electrochemical deposition on positive biased silicon substrates at room temperature. The films adhere well to the Si substrates, but are softer than Si and have many cracks. Multiple binding energy values obtained for the C 1s and N 1s photoelectrons in the film suggest that the C and N atoms both exhibit three chemical states. The Fourier transformation infrared spectroscopy for the film shows four main bands at 1351 cm-1, 1660 cm-1 2147 cm-1 and 3220 cm-1, respectively. The N to C concentration ratio was estimated to be 0.1. Red color photoluminescence with a peak at ~630 nm has been observed in the prepared CNx films.

源语言英语
页(从-至)98-102
页数5
期刊Materials Letters
38
2
DOI
出版状态已出版 - 1月 1999
已对外发布

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