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A thick TiN/TiCN multilayer film by DC magnetron sputtering
Jianyun Zheng, Junying Hao, Xiaoqiang Liu, Qiuyu Gong,
Weimin Liu
CAS - Lanzhou Institute of Chemical Physics
University of Chinese Academy of Sciences
科研成果
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探究 'A thick TiN/TiCN multilayer film by DC magnetron sputtering' 的科研主题。它们共同构成独一无二的指纹。
分类
加权
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Engineering
Ambient Air
50%
Amorphous Carbon
50%
Columnar Structure
50%
Deposited Film
50%
High Deposition Rate
50%
High Resolution
50%
Magnetron
100%
Multilayer Film
100%
Nanocrystalline
50%
Ray Diffraction
50%
Ray Photoelectron Spectroscopy
50%
Service Life
50%
Silicon Substrate
100%
Steel Ball
50%
Wear Resistance
50%
Material Science
Amorphous Carbon
33%
Film
100%
High-Resolution Transmission Electron Microscopy
33%
Magnetron Sputtering
100%
Multilayer Film
100%
Nanocrystalline
33%
Scanning Electron Microscopy
33%
Silicon
66%
Thick Films
33%
Wear Resistance
33%
X-Ray Diffraction
33%
X-Ray Photoelectron Spectroscopy
33%