A study of predominated pathway of initial processes in chemical vapor deposition of silicon-carbide from methyltrichlorosilane and hydrogen system
Xin Wang, Yanli Wang, Yan Liu, Kehe Su, Qingfeng Zeng, Laifei Cheng, Litong Zhang
科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审