A Self-Sustained Mass Sensor With Physical Closed Loop Based on Thermal-Piezoresistive Coupled Resonators

Aojie Quan, Hemin Zhang, Chen Wang, Chenxi Wang, Linlin Wang, Rui Amendoeira Esteves, Yangyang Guan, Chengxin Li, Michael Kraft

科研成果: 期刊稿件文章同行评审

16 引用 (Scopus)

摘要

This article reports a mode-localized mass sensor based on thermal-actuation piezoresistive-detection self-oscillated weakly coupled resonators. Detailed theoretical models and simulations of the self-oscillation of the coupled resonators were established and were also verified using optical and electrical measurements. The sensor was fabricated and characterized in terms of stability, linearity, sensitivity, and resolution. Supplied with only a constant direct current (DC), the resonant mass sensor could oscillate at its resonant frequency with an ultrahigh quality factor of 95 k in air. By implementing the principle of the mode localization phenomenon, 200 times parametric sensitivity improvement with amplitude ratio output was implemented compared to the traditional frequency output metric. A real-time mass detector with 84-fg resolution and larger than 700-pg linear measurement range was obtained.

源语言英语
页(从-至)5808-5813
页数6
期刊IEEE Transactions on Electron Devices
69
10
DOI
出版状态已出版 - 1 10月 2022
已对外发布

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