A prediction algorithm for the smoothing process of large-aperture optical components with complex periodic middle-spatial frequency errors

Jing Hou, Shi Wei Liu, Xian Hua Chen, Qing Hua Zhang, Jian Wang, Bo Zhong, Wen Hui Deng

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Due to the complexity and inhomogeneity of the distribution of the middle-spatial frequency errors (MSFE), the existing theoretical models cannot realize the manufacturability prediction of the smoothing process for the MSFE on the largeaperture optical components. Therefore, based on the parameterized time-domain smoothing model and the idea of regional division, a prediction algorithm suitable for the smoothing process of the MSFE in complex periods is proposed in this paper. The relevant verifiable experiments are carried out. The prediction results are in good agreement with the real data, which indicates that the prediction algorithm proposed in this paper can be applied to predict the smoothing process of the MSFE of large-aperture optical components and guide the polishing process.

源语言英语
主期刊名10th International Symposium on Advanced Optical Manufacturing and Testing Technologies
主期刊副标题Advanced Optical Manufacturing and Metrology Technologies
编辑Mingbo Pu, John H. Marsh, Bin Fan, Yifan Dai, Xiong Li, Xiangang Luo
出版商SPIE
ISBN(电子版)9781510650176
DOI
出版状态已出版 - 2021
已对外发布
活动10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies 2021 - Chengdu, 中国
期限: 14 6月 202117 6月 2021

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
12071
ISSN(印刷版)0277-786X
ISSN(电子版)1996-756X

会议

会议10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies 2021
国家/地区中国
Chengdu
时期14/06/2117/06/21

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