@inproceedings{7dd3b024ea6b465d8f1f06b67015d704,
title = "A novel resonant accelerometer based on mode localization of weakly coupled resonators",
abstract = "This paper describes a novel MEMS resonant accelerometer based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. To the best of the authors' knowledge, it is the first time that this principle is experimentally demonstrated for an accelerometer. When acceleration acts on the two proof masses, there will be a differential electrostatic stiffness perturbation introduced on the WCRs, which leads to mode localization and mode shape change. Therefore, the acceleration can be sensed by measuring the amplitude ratio shift. The measured relative shift in amplitude ratio (∼312162 ppm/g) is 302 times higher than the shift in resonance frequency (∼1035 ppm/g).",
keywords = "high sensitivity, mode localization, Resonant accelerometer, weakly coupled resonators",
author = "Zhang, {H. M.} and Yuan, {W. Z.} and Li, {B. Y.} and Hao, {Y. C.} and M. Kraft and Chang, {H. L.}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181112",
language = "英语",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1073--1076",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
}