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西北工业大学 国内
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A novel microstructure for in-situ measurement of residual stress in micromechanlcal thin films
Yi Ting Yu
,
Wei Zheng Yuan
, Da Yong Qiao, Qing Liang
机电学院
Northwestern Polytechnical University Xian
科研成果
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探究 'A novel microstructure for in-situ measurement of residual stress in micromechanlcal thin films' 的科研主题。它们共同构成独一无二的指纹。
分类
加权
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Engineering
Residual Stress
100%
Thin Films
100%
Situ Measurement
100%
Critical Buckling
60%
Finite Element Analysis
40%
Compressive Residual Stress
20%
Good Agreement
20%
Situ Observation
20%
Tensile Residual Stress
20%
Surface Micro-Machining
20%
Buckling Stress
20%
Material Science
Residual Stress
100%
Thin Films
100%
Finite Element Method
33%
Surface (Surface Science)
16%
Micromachining
16%