@inproceedings{3012ec6a62fa424d812f239ab1bcfb17,
title = "A novel flying height measurement approach for optical sliders",
abstract = "In this paper we present a proposal for a novel thermal sensor for in-situ flying height measurement by implementing the sensing structures in the air bearing surface (ABS) of optical flying heads. The sensor's task is to dynamically measure flying height, as well as flight attitude parameters such as pitch, and roll. The sensor's location and the microfabrication process involved strongly influence the design process of such micro thermoresistive (TR) sensors and data from the heat transfer model have to be considered. FEM simulations were carried out to analyze the optical head-sensor-disk system thermally and to examine the heat induced distortion and stress. The simulations revealed, that the temperature influenced area is limited to the sensors' footprint and that the thermal distortion remains at a tolerable level of below 4 nm. As an additional result, the influence of flying height on the sensor's temperature was computed to vary from 30°C to 37.5°C for a flying height range from 100 nm to 1000 nm.",
keywords = "Analytical models, Conducting materials, Heat transfer, Magnetic flux, Magnetic heads, Optical distortion, Optical recording, Optical sensors, Temperature sensors, Thermal sensors",
author = "Binghe Ma and Caspar Morsbach and Gatzen, {Hans H.}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 Asian Conference on Sensors, AsiaSENSE 2003 ; Conference date: 18-07-2003",
year = "2003",
doi = "10.1109/ASENSE.2003.1224988",
language = "英语",
series = "2003 Asian Conference on Sensors, AsiaSENSE 2003",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "29--32",
editor = "Ghodgaonkar, {Deepak K.} and Jumat Salimon and Yousof, {Rabi W.} and Taib, {Mohamad Nasir} and Salmijah Surif and Musa Ahmad and Lee, {Yook Heng}",
booktitle = "2003 Asian Conference on Sensors, AsiaSENSE 2003",
}