A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators

Hemin Zhang; Weizheng Yuan; Jie Huang; Boyang Li; Honglong Chang

doi:10.1109/MEMSYS.2016.7421564

A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators

Hemin Zhang, Weizheng Yuan, Jie Huang, Boyang Li, Honglong Chang

机电学院

Northwestern Polytechnical University Xian

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

17 引用（Scopus）

摘要

This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, the small electric charge input will cause a stiffness perturbation to one resonator of the WCRs, leading to a drastic change of the mode shape owing to the mode localization phenomena. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The experimental results show that with a charge input of 144fC the relative sensitivity based on the amplitude ratio is 663751ppm, which is -2341 times higher than that of the frequency (283.56ppm).

源语言	英语
主期刊名	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
出版商	Institute of Electrical and Electronics Engineers Inc.
页	87-90
页数	4
ISBN（电子版）	9781509019731
DOI	https://doi.org/10.1109/MEMSYS.2016.7421564
出版状态	已出版 - 26 2月 2016
活动	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, 中国期限: 24 1月 2016 → 28 1月 2016

出版系列

姓名	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
卷	2016-February
ISSN（印刷版）	1084-6999

会议

会议	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
国家/地区	中国
市	Shanghai
时期	24/01/16 → 28/01/16

访问文件

10.1109/MEMSYS.2016.7421564

其它文件与链接

链接到 Scopus 的出版物

引用此

Zhang, H., Yuan, W., Huang, J., Li, B., & Chang, H. (2016). A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. 在 MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (页码 87-90). 文章 7421564 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421564

Zhang, Hemin ; Yuan, Weizheng ; Huang, Jie 等. / A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. 页码 87-90 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{177645bd48e34270b4039fa46afadbce,

title = "A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators",

abstract = "This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, the small electric charge input will cause a stiffness perturbation to one resonator of the WCRs, leading to a drastic change of the mode shape owing to the mode localization phenomena. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The experimental results show that with a charge input of 144fC the relative sensitivity based on the amplitude ratio is 663751ppm, which is -2341 times higher than that of the frequency (283.56ppm).",

author = "Hemin Zhang and Weizheng Yuan and Jie Huang and Boyang Li and Honglong Chang",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",

year = "2016",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2016.7421564",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "87--90",

booktitle = "MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems",

}

Zhang, H , Yuan, W, Huang, J, Li, B & Chang, H 2016, A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. 在 MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421564, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 卷 2016-February, Institute of Electrical and Electronics Engineers Inc., 页码 87-90, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, 中国, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421564

A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. / Zhang, Hemin ; Yuan, Weizheng; Huang, Jie 等.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. 页码 87-90 7421564 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 卷 2016-February).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators

AU - Zhang, Hemin

AU - Yuan, Weizheng

AU - Huang, Jie

AU - Li, Boyang

AU - Chang, Honglong

PY - 2016/2/26

Y1 - 2016/2/26

N2 - This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, the small electric charge input will cause a stiffness perturbation to one resonator of the WCRs, leading to a drastic change of the mode shape owing to the mode localization phenomena. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The experimental results show that with a charge input of 144fC the relative sensitivity based on the amplitude ratio is 663751ppm, which is -2341 times higher than that of the frequency (283.56ppm).

AB - This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, the small electric charge input will cause a stiffness perturbation to one resonator of the WCRs, leading to a drastic change of the mode shape owing to the mode localization phenomena. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The experimental results show that with a charge input of 144fC the relative sensitivity based on the amplitude ratio is 663751ppm, which is -2341 times higher than that of the frequency (283.56ppm).

UR - http://www.scopus.com/inward/record.url?scp=84970965922&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2016.7421564

DO - 10.1109/MEMSYS.2016.7421564

M3 - 会议稿件

AN - SCOPUS:84970965922

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 87

EP - 90

BT - MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016

Y2 - 24 January 2016 through 28 January 2016

ER -

Zhang H , Yuan W, Huang J, Li B, Chang H. A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators. 在 MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. 页码 87-90. 7421564. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421564

A high-sensitive resonant electrometer based on mode localization of the weakly coupled resonators

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