A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane

Aojie Quan, Hemin Zhang, Chen Wang, Jan Willem Burssens, Linlin Wang, Chenxi Wang, Michel De Cooman, Michael Kraft

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

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Engineering

Material Science