A μGal MOEMS gravimeter designed with free-form anti-springs

Shuang Wu, Wenhui Yan, Xiaoxu Wang, Qingxiong Xiao, Zhenshan Wang, Jiaxin Sun, Xinlong Yu, Yaoxian Yang, Qixuan Zhu, Guantai Yang, Zhongyang Yao, Pengfei Li, Chao Jiang, Wei Huang, Qianbo Lu