像素级光学滤波-探测集成器件的研究进展

The majority of the present spectral imaging systems couple traditional filters with photodetectors, which are too large and cannot be customized. The rapid advances in micro/nano-opto-electro-mechanical systems have provided effective solutions for the continuing miniaturization of spectral imaging systems. Based on plasmonics and optical metasurfaces, micro/nano color filters are capable of regulating light fields at the pixel level and thus have the potential to replace traditional filters and to be integrated with imaging systems on chips. In recent years, microspectral imaging systems integrated with dynamic or static filters have come to the forefront of new research and are enabling the development of new methods of spectral imaging. However, complete understanding of the fundamental theories of plasmonic filters remains elusive. In addition, a host of problems exist in terms of device performance, manufacturing cost, and assembly processes. In this review, we present the research progress of pixel-level integrated microdevices for spectral imaging, including micro/nano color filters, integrated manufacturing of filters and imagers, and assembly techniques of microspectral imaging systems. We also summarize the limitations and discuss the development trends of microspectral imaging systems.