Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors

Yilin Qu; Feng Jin; Jiashi Yang

doi:10.3390/mi13081243

Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors

Yilin Qu, Feng Jin, Jiashi Yang

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.

Original language	English
Article number	1243
Journal	Micromachines
Volume	13
Issue number	8
DOIs	https://doi.org/10.3390/mi13081243
State	Published - Aug 2022
Externally published	Yes

Keywords

beam
flexoelectric
gyroscope
vibration

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10.3390/mi13081243

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title = "Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors",

abstract = "We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.",

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author = "Yilin Qu and Feng Jin and Jiashi Yang",

note = "Publisher Copyright: {\textcopyright} 2022 by the authors.",

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doi = "10.3390/mi13081243",

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N2 - We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.

AB - We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.

KW - beam

KW - flexoelectric

KW - gyroscope

KW - vibration

UR - http://www.scopus.com/inward/record.url?scp=85137588822&partnerID=8YFLogxK

U2 - 10.3390/mi13081243

DO - 10.3390/mi13081243

M3 - 文章

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VL - 13

JO - Micromachines

JF - Micromachines

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ER -

Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors

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Keywords

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