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Uniform design and regression analysis of LPCVD boron carbide from BCl 3 -CH 4 -H 2 system
Yongsheng Liu, Litong Zhang, Laifei Cheng, Qingfeng Zeng, Weihua Zhang, Wenbin Yang, Zude Feng, Siwei Li, Bin Zeng
Research output: Contribution to journal › Article › peer-review