Thermodynamic calculations and kinetic verifications on the chemical vapor deposition process of Si-C-N ceramic from the SiCl3CH3-NH3-H2-Ar precursors

Yongsheng Liu, Xiaofei Liu, Fang Ye, Litong Zhang, Laifei Cheng, Xiaowei Yin

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

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