Thermodynamic and kinetic studies on the deposition of silicon carbon nitride from CH3SiCl3-C3H6-NH 3-H2-Ar and its excellent electromagnetic absorbing property

Fang Ye, Litong Zhang, Xiaowei Yin, Xiaofei Liu, Yongsheng Liu, Jimei Xue, Laifei Cheng

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

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Chemical Engineering