Thermodynamic analysis on the codeposition of SiC-Si3N 4 composite ceramics by chemical vapor deposition using SiCl 4-NH3-CH4-H2-Ar mixture gases

Jimei Xue, Xiaowei Yin, Fang Ye, Litong Zhang, Laifei Cheng

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

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