@inproceedings{3a8743f643414cb1860678e2f9c89b27,
title = "The relationship between the initial gas ratios and the condensed phase composition in the CVD of BxC with CH4-H2 precursors",
abstract = "For the preparation of the self-healing phase BxC with BC 3-CH4-H2 precursors, the production has been examined as a function of the initial gas ratios of BCl3(BCl 3+CH4) and H2(BCl3+CH4) at given temperature and pressure. The results show that the composition of the condensed phase is quite sensitive to the molar ratio of BCl 3(BCl3+CH4) and H2(BCl 3+CH4). The ideal condition for the deposition of B xC is that the ratio of BCl3(BCl3+CH 4) is 0.8 and the H2(BCl3+CH4) ratio ranges from 10 to 105.2. The carbon or boron-rich material is mainly controlled by the ratios of BCl3(BCl3+CH4) and H2(BCl3+CH4). The deposition condition of carbon-rich phase should be in low BCl3(BCl3+CH 4) (0.0∼0.8) and H2(BCl3+CH4) (10-2<102) ratios, whereas that of the boron-rich phase needs high BCl3(BCl3+CH4) (0.8∼1.0) and H2(BCl3+CH4) (104∼10 5) ratios.",
keywords = "Boron carbide, Condensed phase, CVD, Deposition condition, Thermodynamics",
author = "Deng, {Juan Li} and Cheng, {Lai Fei} and Gao, {Li Ning} and Su, {Ke He}",
year = "2011",
doi = "10.4028/www.scientific.net/AMR.239-242.1761",
language = "英语",
isbn = "9783037851234",
series = "Advanced Materials Research",
pages = "1761--1765",
booktitle = "Advanced Materials",
note = "2011 International Conference on Chemical Engineering and Advanced Materials, CEAM 2011 ; Conference date: 28-05-2011 Through 30-05-2011",
}