TY - JOUR
T1 - The analysis of the self-oscillation system for resonant pressure sensor
AU - Sun, Xiaodong
AU - Yuan, Weizheng
AU - Qiao, Dayong
AU - Ren, Sen
N1 - Publisher Copyright:
© 2016, Springer-Verlag Berlin Heidelberg.
PY - 2017/4/1
Y1 - 2017/4/1
N2 - In this paper a detailed analysis on the self-oscillation system that is used for the resonant pressure sensor is presented. The stability and transient response of the system are investigated through a theoretical model, which is verified by experiment. This analysis provides an approach to optimize the parameters of the control system to get a short settling time and a stable system in the full pressure scale. The sensor chip is fabricated using a commercially available silicon-on-insulator wafer. By optimizing the parameters, the self-oscillation system for the sensor works well and the setting time is less than 300 ms in full pressure scale. The calibration result shows that the resonant pressure sensor has a nonlinearity of 0.045 %FS, a hysteresis error of 0.14 %FS, and a repeatability error of 0.18 %FS.
AB - In this paper a detailed analysis on the self-oscillation system that is used for the resonant pressure sensor is presented. The stability and transient response of the system are investigated through a theoretical model, which is verified by experiment. This analysis provides an approach to optimize the parameters of the control system to get a short settling time and a stable system in the full pressure scale. The sensor chip is fabricated using a commercially available silicon-on-insulator wafer. By optimizing the parameters, the self-oscillation system for the sensor works well and the setting time is less than 300 ms in full pressure scale. The calibration result shows that the resonant pressure sensor has a nonlinearity of 0.045 %FS, a hysteresis error of 0.14 %FS, and a repeatability error of 0.18 %FS.
UR - http://www.scopus.com/inward/record.url?scp=84955320166&partnerID=8YFLogxK
U2 - 10.1007/s00542-016-2818-2
DO - 10.1007/s00542-016-2818-2
M3 - 文章
AN - SCOPUS:84955320166
SN - 0946-7076
VL - 23
SP - 945
EP - 951
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 4
ER -