Self-ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation-induced atomic intermixing and degraded film properties

Jiao Xu, Li Qiao, Zewen Duan, Dengji Guo, Liqiang Chai, Xiaoyu Zhao, Peng Wang, Weimin Liu

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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