Secondary electron emission of (Mg-Zn-O)/(MgO-Au) bilayer composite film deposited by sputtering

Jie Li, Wenbo Hu, Qiang Wei, Shengli Wu, Yongdong Li, Huiqing Fan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

(Mg-Zn-O)/(MgO-Au) bilayer composite film was proposed, and the influence of Zn-doping concentration on the surface morphology, electronic structure and electron-induced secondary electron emission (SEE) performance of this composite film was investigated. The investigation results show that the Zn doping with a low concentration in the MgO surface layer brings about the enlargement of grain size and the reductions of both bandgap and work function of MgO, which leads to the superior SEE performance owned by (Mg-Zn-O)/(MgO-Au) composite film.

Original languageEnglish
Title of host publication2019 International Vacuum Electronics Conference, IVEC 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538675342
DOIs
StatePublished - Apr 2019
Event2019 International Vacuum Electronics Conference, IVEC 2019 - Busan, Korea, Republic of
Duration: 28 Apr 20191 May 2019

Publication series

Name2019 International Vacuum Electronics Conference, IVEC 2019

Conference

Conference2019 International Vacuum Electronics Conference, IVEC 2019
Country/TerritoryKorea, Republic of
CityBusan
Period28/04/191/05/19

Keywords

  • (Mg-Zn-O)/(MgO-Au) bilayer composite film
  • bandgap
  • grain size
  • secondary electron emission
  • work function

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