Research progress on thermal wall shear stress sensors

Baoyun Sun; Binghe Ma; Jinjun Deng; Chengyu Jiang

doi:10.11729/syltlx20170022

Research progress on thermal wall shear stress sensors

Baoyun Sun, Binghe Ma, Jinjun Deng, Chengyu Jiang

School of Microelectronics

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Review article › peer-review

2 Scopus citations

Abstract

Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.

Original language	English
Pages (from-to)	26-33 and 43
Journal	Shiyan Liuti Lixue/Journal of Experiments in Fluid Mechanics
Volume	31
Issue number	2
DOIs	https://doi.org/10.11729/syltlx20170022
State	Published - 1 Apr 2017

Keywords

Measurement technology
MEMS
Micro sensor
Thermal
Wall shear stress

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10.11729/syltlx20170022

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title = "Research progress on thermal wall shear stress sensors",

abstract = "Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.",

keywords = "Measurement technology, MEMS, Micro sensor, Thermal, Wall shear stress",

author = "Baoyun Sun and Binghe Ma and Jinjun Deng and Chengyu Jiang",

year = "2017",

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doi = "10.11729/syltlx20170022",

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T1 - Research progress on thermal wall shear stress sensors

AU - Sun, Baoyun

AU - Ma, Binghe

AU - Deng, Jinjun

AU - Jiang, Chengyu

PY - 2017/4/1

Y1 - 2017/4/1

N2 - Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.

AB - Micro Electro-Mechanical Systems (MEMS)-based shear stress sensors provide a significant method in wall shear stress measurement. In this paper, the research progress of thermal wall shear sensors is introduced. And the sensing principle, device structure, fabrication processes, and performance test of the silicon-based and flexible polymer-based thermal wall shear stress sensors are analyzed.

KW - Measurement technology

KW - MEMS

KW - Micro sensor

KW - Thermal

KW - Wall shear stress

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DO - 10.11729/syltlx20170022

M3 - 文献综述

AN - SCOPUS:85020450237

SN - 1672-9897

VL - 31

SP - 26-33 and 43

JO - Shiyan Liuti Lixue/Journal of Experiments in Fluid Mechanics

JF - Shiyan Liuti Lixue/Journal of Experiments in Fluid Mechanics

IS - 2

ER -

Research progress on thermal wall shear stress sensors

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Keywords

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