TY - GEN
T1 - Prototyping of the computer integrated manufacturing processes of MEMS in a desktop micro-factory
AU - Wang, Yubo
AU - Yuan, Weizheng
AU - Jiang, Chengyu
PY - 2008
Y1 - 2008
N2 - The potential of MEMS application is very high and its benefit is widely recognized. However, there are some difficulties in the production, for example, the post process of MEMS, packaging, dieing and test are all separate processes and this is different to the wafer mass production procedure. Desktop microfactory, a novel concept for the manufacture of MEMS, was proposed to effectively utilize the small fabricating facilities available nowadays for the production of miniature products or parts. Desktop micro-factory is a compact production system with its facilities so small that the whole shop floor arrangement can be mounted on a table. Obviously, it is highly mobile and its operation can be kept stable while the entire production environment is shielded from interference. In this paper, establishment of a prototyping system of a desktop micro-factory for the packaging process of accelerometer in desktop micro-factory is discussed. Computer integrated manufacturing system (CIMS) approach is applied to design the system. Based on the modelling of the micro-factory and its production activities, the simulation of the manufacturing process was realized. The work provided experience and basis for deeper understanding of micro-CIM, micro production process planning, micro production system modelling, and for further development of an effectively workable micro-factory.
AB - The potential of MEMS application is very high and its benefit is widely recognized. However, there are some difficulties in the production, for example, the post process of MEMS, packaging, dieing and test are all separate processes and this is different to the wafer mass production procedure. Desktop microfactory, a novel concept for the manufacture of MEMS, was proposed to effectively utilize the small fabricating facilities available nowadays for the production of miniature products or parts. Desktop micro-factory is a compact production system with its facilities so small that the whole shop floor arrangement can be mounted on a table. Obviously, it is highly mobile and its operation can be kept stable while the entire production environment is shielded from interference. In this paper, establishment of a prototyping system of a desktop micro-factory for the packaging process of accelerometer in desktop micro-factory is discussed. Computer integrated manufacturing system (CIMS) approach is applied to design the system. Based on the modelling of the micro-factory and its production activities, the simulation of the manufacturing process was realized. The work provided experience and basis for deeper understanding of micro-CIM, micro production process planning, micro production system modelling, and for further development of an effectively workable micro-factory.
KW - Desktop micro-factory
KW - MEMS
KW - Prototyping system
UR - http://www.scopus.com/inward/record.url?scp=77957344605&partnerID=8YFLogxK
U2 - 10.1007/978-1-84800-241-8_77
DO - 10.1007/978-1-84800-241-8_77
M3 - 会议稿件
AN - SCOPUS:77957344605
SN - 9781848002401
T3 - Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance
SP - 767
EP - 773
BT - Advanced Design and Manufacture to Gain a Competitive Edge
PB - CSREA Press
T2 - Advanced Design and Manufacture to Gain a Competitive Edge: New Manufacturing Techniques and their Role in Improving Enterprise Performance
Y2 - 14 January 2008 through 16 January 2008
ER -