Abstract
The current state and progress of the micro-tribological studies on micro-electro-mechanical systems (MEMS) are summarized. Various new features of the friction and wear behavior of the MEMS are introduced. And the effects of the material properties, environments and working conditions on the operation of MEMS are briefed. The lubrication of MEMS is elucidated from the viewpoint of nano-tribology, while the application of surface modification and ultra-thin film lubrication for MEMS is discussed. Moreover, a prospect concerning the further research work on the micro-and nano-tribology of MEMS is also provided.
| Original language | English |
|---|---|
| Pages (from-to) | 494-498 |
| Number of pages | 5 |
| Journal | Mocaxue Xuebao/Tribology |
| Volume | 21 |
| Issue number | 6 |
| State | Published - Nov 2001 |
| Externally published | Yes |
Keywords
- Lubrication
- MEMS
- Micro-tribology
- Surface modification
- Ultra-thin film