Parallel processing for femto-laser microfabrication

More and more attention is paid to femto-laser microfabrication due to its unique technological features, such as fabrication ability of true 3D microstructures and sub-micron resolution. But low efficiency is the disadvantage of this technology. To increase the efficiency, a system for parallel fabrication was built up using a microlen array to produce multiple spots, and the parallel femto-laser fabrication was preliminarily realized. Two-dimensional multiple structures were manufactured, such as micro letters demonstrated as examples of mass production, from the photopolymerizable resin and glass, and the single point resolution is 1.25 μm. The coherence and resolution are analysed according to the results of the experiment, and the method to increase the coherence and resolution is brought forward.