Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode

Zinan Zhao, Nian Li, Yilin Qu, Weiqiu Chen

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint

Dive into the research topics of 'Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode'. Together they form a unique fingerprint.

Material Science

Engineering