Fingerprint
Dive into the research topics of 'New precursor for metal organic chemical vapor deposition of iridium thin films'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
New precursor for metal organic chemical vapor deposition of iridium thin films
Xin Yan, Qiuyu Zhang, Xiaodong Fan
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations