Skip to main navigation
Skip to search
Skip to main content

Northwestern Polytechnical University Home

- English
- 中文

Home
Profiles
Research units
Research output

Search by expertise, name or affiliation

Multivariable immune predictive R2R control method for CMP process

Liang Wang, Jingtao Hu

CAS - Shenyang Institute of Automation
University of Chinese Academy of Sciences
Shenyang Institute of Chemical Technology

Research output: Contribution to journal › Article › peer-review

Overview
Fingerprint

Fingerprint

Dive into the research topics of 'Multivariable immune predictive R2R control method for CMP process'. Together they form a unique fingerprint.

Sort by
Weight
Alphabetically

Engineering

Chemical Engineering

Powered by Pure, Scopus & Elsevier Fingerprint Engine™

All content on this site: Copyright © 2025 Northwestern Polytechnical University, its licensors, and contributors. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For all open access content, the relevant licensing terms apply

We use cookies to help provide and enhance our service and tailor content. By continuing you agree to the use of cookies

About web accessibility

Report vulnerability